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20nm desktop X-ray source with a pulse width of 7 ns
Unit Price
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Part Number
EUV-B-XRAY
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Stock
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Main parameter

参数

单位

指标

产品编号


EUV-B-XRAY

工作波长

nm

20nm

脉宽

ns

7

脉冲能量(Xe

mJ

3.5(4π sr, 2% BW)

转换效率

%

0.45

等离子形状

NA

Ø ~ 300 µm

重复频率

Hz

10

Product Recommendation