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Plasma light source
Plasma light source
Extreme ultraviolet light source
EUV light source with high duty cycle and turnkey operation (user-friendly and equipped with automation protocols to ensure smooth system operation, without risk or interruption)
Product PN# product name Laser average power Pulse repetition rate Plasma stability Other parameters
Plasma light source
ISTEQ's XWS-30 light source product is specifically developed for customers who require ultra compact broadband light sources with low heat dissipation while maintaining high plasma brightness
Product PN# product name Spectral Range Output Power Other parameters