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Plasma light source

Extreme ultraviolet light source

EUV light source with high duty cycle and turnkey operation (user-friendly and equipped with automation protocols to ensure smooth system operation, without risk or interruption)

Product PN#	product name	Laser average power	Pulse repetition rate	Plasma stability
TEUS S-400	TEUS S-400 Extreme Ultraviolet Light Source	400W	100kHz或200kHz(可调)	3% RMS	Add Inquiry
TEUS S-200	TEUS S-200 Extreme Ultraviolet Light Source	200W	50kHz或135kHz(可调)	3% RMS	Add Inquiry
TEUS S-100	TEUS S-100 Extreme Ultraviolet Light Source	100W	25kHz或70kHz(z高)	3% RMS	Add Inquiry

Plasma light source

ISTEQ's XWS-30 light source product is specifically developed for customers who require ultra compact broadband light sources with low heat dissipation while maintaining high plasma brightness

Product PN#	product name	Spectral Range	Output Power
XWS-X	XWS-X broadband plasma light source	190 - 2500nm	1.5W	Add Inquiry
XWS-65	XWS-65 broadband plasma light source	190 - 2500nm	1.8W	Add Inquiry
XWS-30	XWS-30 Compact Broadband Plasma Light Source	190 - 2500nm	1W	Add Inquiry