EUV light source with high duty cycle and turnkey operation (user-friendly and equipped with automation protocols to ensure smooth system operation, without risk or interruption)
Product PN#
product name
Laser average power
Pulse repetition rate
Plasma stability
Other parameters
Plasma light source
ISTEQ's XWS-30 light source product is specifically developed for customers who require ultra compact broadband light sources with low heat dissipation while maintaining high plasma brightness